TRIS(DIMETHYLAMINO)SILANE

CAS NO: 15112-89-7
Molecular Formula: C6H19N3Si
Molecular Weight: 161.32

Synonyms

Tris(dimethyamino)silane

TRIS(DIMETHYLAMINO)SILANE

TRIS(DIMETHYLAMINO)SILANE 99+%

TRIS(DIMETHYLAMINO)SILANE, 99.9+%

N,N',N''-Silanetriyltris(dimethylamine)

N,N',N''-(Silanetriyl)tris(dimethylamine)

n,n,n’,n’,n’’,n’’-hexamethylsilanetriamine

n,n,n’,n’,n’’,n’’-hexamethyl-silanetriamin

N,N,N’,N’,N’’,N’’-hexamethyl-Silanetriamine

Tris(diMethylaMino)silane, 99+%, 14-8750, contained in 50 Ml Swagelok cylinder (96-1070) for CVD/ALD

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Chemical Properties

mp :

<0°C
bp :

145 °C
fp :

25°C
density :

0,838 g/cm3